* Kalrez(제품선정가이드)- Product Selector Guide
1. 가혹한 Plasma 환경 1) CVD, Dry-Etching, Ashing, ALD, PVD,... 2) Seal 수명 연장 &Particle 억제 3) Compound: 9500, 9300, 9100, 8085, 8002, 6005 4) 적용부위: Gas Line, Door, Fitting, Lid, ··· 2. 고온 환경 (over 300℃) 1) Oxidation, Diffusion, RTP, LPCVD,.... 2) 고온 안전성 확보, Particle 억제 3) Compound: 8900, 7075, 8485 4) 적용부위: Center-ring, Quartz, Chamber Lid, ··· 3. 습식 및 화학반응 환경 1) CMP, Cleaning, Wet-Etching, Stripping, ... 2) 강력한 화학적 안정성 확보 3) Compound: 6375, 4079, 1050LF 4) 적용부위: All Purpose
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