* Kalrez(제품선정가이드)- Product Selector Guide

1. 가혹한 Plasma 환경 
  1) CVD, Dry-Etching, Ashing, ALD, PVD,...
  2) Seal 수명 연장 &Particle 억제
  3) Compound: 9500, 9300, 9100, 8085, 8002, 6005
  4) 적용부위: Gas Line, Door, Fitting, Lid, ···
 
2. 고온 환경 (over 300℃)
  1) Oxidation, Diffusion, RTP, LPCVD,....
  2) 고온 안전성 확보, Particle 억제
  3) Compound: 8900, 7075, 8485
  4) 적용부위: Center-ring, Quartz, Chamber Lid, ···

 
3. 습식 및 화학반응 환경
  1) CMP, Cleaning, Wet-Etching, Stripping, ...
  2) 강력한 화학적 안정성 확보
  3) Compound: 6375, 4079, 1050LF
  4) 적용부위: All  Purpose